SPM calibration specimens, 300-2D

SPM calibration specimens are produced by holographic fabrication and are accurate to 0.5%.Features:Easier testing of your SPM.Improved accuracy of critical dimension measurements.Accuracy: 0.5% (1 std. dev.).Holographic fabrication - assures high accuracy and precision.Pattern height > 100nm - provide excellent image contrast.Uniform coverage of entire chip - save time (can image anywhere).Description:Nominal calibrated dimensions: 300 or 700nm.Calibration certificate: supplied with each sample, stating the dimension to the nearest 1nm.Pattern types: 1- or 2—Dimensional. The calibrated dimension is the same for both axes for the 2-D standard.Feature geometry:-parallel ridges (1-D, 300 or 700nm)-cylindrical posts (2-D 300nm)-diamond-shaped posts (2-D 700nm)Physical Size: 3mm x 4mm x 0.5mm.

SPM calibration specimens are produced by holographic fabrication and are accurate to 0.5%.

Features:

  • Easier testing of your SPM.
  • Improved accuracy of critical dimension measurements.
  • Accuracy: 0.5% (1 std. dev.).
  • Holographic fabrication - assures high accuracy and precision.
  • Pattern height > 100nm - provide excellent image contrast.
  • Uniform coverage of entire chip - save time (can image anywhere).

Description:

  • Nominal calibrated dimensions: 300 or 700nm.
  • Calibration certificate: supplied with each sample, stating the dimension to the nearest 1nm.
  • Pattern types: 1- or 2—Dimensional. The calibrated dimension is the same for both axes for the 2-D standard.
  • Feature geometry:
    -parallel ridges (1-D, 300 or 700nm)
    -cylindrical posts (2-D 300nm)
    -diamond-shaped posts (2-D 700nm)
  • Physical Size: 3mm x 4mm x 0.5mm.
  • Substrate: Silicon wafer.
  • Top surface: Tungsten film.

The 1-D standards can be scanned using any AFM mode, including contact mode. The 2-D standards can be scanned using modes such as Tapping Mode, intermittent contact, and non-contact.

Models 300-2D

All mounted on 15 mm steel disk.

  • Array of Posts
  • Pitch 297
  • Al bumps on Si
  • use contact or TappingMode
  • SEM pin

References

1. Pereira, D.E.D. & Claudio-da-Silva, Jr., E. “Improvement of AFM as an analytical Instrument for Residual Lignin Characterization” in: Proceedings International Symposium on Wood and Pulping Chemistry, Helsinki, Finland, June 1995.

2. Pereria, D.E.D, Chernoff, D., Claudio-da-Silva, Jr. E., & Cemuner, B.J., “The use of AFM to investigate the delignification process: Part I –AFM performance by differentiating pulping processes”, to be published.

300-2D, pattern: array of posts, nominal pitch: 300 nm, material: W-coated photoresist on Si.

Updated: 31-12-2024
Code Title Surface Pack Size Availability Price Updated: 31-12-2024
EMS80123-2D SPM calibration specimens, 300-2D Unmounted Each 0 in stock (?) P.O.R. Quote
EMS80123-2D-AFM SPM calibration specimens, 300-2D AFM Each 0 in stock (?) P.O.R. Quote
EMS80123-2D-X SPM calibration specimens, 300-2D Custom Each 0 in stock (?) P.O.R. Quote