SPM calibration specimens, 300-2D
SPM calibration specimens are produced by holographic fabrication and are accurate to 0.5%.
Features:
- Easier testing of your SPM.
- Improved accuracy of critical dimension measurements.
- Accuracy: 0.5% (1 std. dev.).
- Holographic fabrication - assures high accuracy and precision.
- Pattern height > 100nm - provide excellent image contrast.
- Uniform coverage of entire chip - save time (can image anywhere).
Description:
- Nominal calibrated dimensions: 300 or 700nm.
- Calibration certificate: supplied with each sample, stating the dimension to the nearest 1nm.
- Pattern types: 1- or 2—Dimensional. The calibrated dimension is the same for both axes for the 2-D standard.
- Feature geometry:
-parallel ridges (1-D, 300 or 700nm)
-cylindrical posts (2-D 300nm)
-diamond-shaped posts (2-D 700nm) - Physical Size: 3mm x 4mm x 0.5mm.
- Substrate: Silicon wafer.
- Top surface: Tungsten film.
The 1-D standards can be scanned using any AFM mode, including contact mode. The 2-D standards can be scanned using modes such as Tapping Mode, intermittent contact, and non-contact.
Models 300-2D
All mounted on 15 mm steel disk.
- Array of Posts
- Pitch 297
- Al bumps on Si
- use contact or TappingMode
- SEM pin
References
1. Pereira, D.E.D. & Claudio-da-Silva, Jr., E. “Improvement of AFM as an analytical Instrument for Residual Lignin Characterization” in: Proceedings International Symposium on Wood and Pulping Chemistry, Helsinki, Finland, June 1995.
2. Pereria, D.E.D, Chernoff, D., Claudio-da-Silva, Jr. E., & Cemuner, B.J., “The use of AFM to investigate the delignification process: Part I –AFM performance by differentiating pulping processes”, to be published.
300-2D, pattern: array of posts, nominal pitch: 300 nm, material: W-coated photoresist on Si.
Code | Title | Surface | Pack Size | Availability | Price | Updated: 31-12-2024 |
---|---|---|---|---|---|---|
EMS80123-2D | SPM calibration specimens, 300-2D | Unmounted | Each | 0 in stock (?) | P.O.R. | Quote |
EMS80123-2D-AFM | SPM calibration specimens, 300-2D | AFM | Each | 0 in stock (?) | P.O.R. | Quote |
EMS80123-2D-X | SPM calibration specimens, 300-2D | Custom | Each | 0 in stock (?) | P.O.R. | Quote |
* Ordering Schedule
This item is available for back-order where 0 stock is listed.
We order from this manufacturer weekly, with an estimated lead time of 4 weeks.
This is the estimated lead time, based on the average time taken previously to fill orders from this particular supplier.
Lead times are from when we receive your order until when we fill your order. For delivery times, please see shipping information below.