Evactron SoftClean system and accessories

The Evactron SoftClean system extends the ability to pre-clean specimens, specimen mounts, and holders with the proven downstream plasma ashing process before examination in the chamber insuring high image quality. The Evactron SoftClean Chamber can also be used as a specimen storage system, keeping samples in a clean environment.The downstream plasma process used in the system is gentle and effective at removing hydrocarbon contamination where sputter etching by other plasma cleaners can damage specimens through exposure to energetic ions and heat. The system uses reactive gas radicals to remove hydrocarbons from specimen surfaces by chemical etch, preserving critical sample fine structure. This downstream etching process breaks down residues into smaller molecules such as CO2, H2O and CO, which are easily pumped out of the chamber.Electron microscope image quality is greatly improved by the removal of hydrocarbon contamination from microscope chambers and from spe...

The Evactron SoftClean system extends the ability to pre-clean specimens, specimen mounts, and holders with the proven downstream plasma ashing process before examination in the chamber insuring high image quality. The Evactron SoftClean Chamber can also be used as a specimen storage system, keeping samples in a clean environment.

The downstream plasma process used in the system is gentle and effective at removing hydrocarbon contamination where sputter etching by other plasma cleaners can damage specimens through exposure to energetic ions and heat. The system uses reactive gas radicals to remove hydrocarbons from specimen surfaces by chemical etch, preserving critical sample fine structure. This downstream etching process breaks down residues into smaller molecules such as CO2, H2O and CO, which are easily pumped out of the chamber.

Electron microscope image quality is greatly improved by the removal of hydrocarbon contamination from microscope chambers and from specimen mounts, specimen holders, and the specimens themselves.

Features:

  • Windows and Android GUI software
  • Optional Safar side loaders (US 8,716,676 B2)
  • Accommodates up to three TEM stage rods
  • Cleans SEM/TEM samples, TEM grids/sample rods and is inert sample storage
  • Can use air for oxygen radicals, or use other gases for alternative plasma processes
  • Easy setup, preset pressure, power and time settings. Operated from either front panel or computer interface
  • Advanced plasma detection logic, cleaning and error logs record history and aid troubleshooting
  • Optional shroud can cover transducer and valve assembly on the PRS

Pump specifications:

  • A dry scroll pump rated at 6.8m3/h or better
  • A pump rated at 13.5m3/h is preferred
  • Possible to adapt KF16 flange on the pump valve to a KF25 flange found on many roughing pumps
  • Use a roughing line of 25mm in diameter or larger

Specifications:

Chassis of SoftClean System 90mm H x 230mm W x 480mm D
Shipping Weight 10kg
RF Power 5-20W at 13.56MHz
Electrical 90-250VAC 50/60 Hz input
Pump KF40 vacuum mounting flange, adapter flanges available
Optional Accessories 
EMS91000-18
TEM Adapter for JEOL
EMS91000-19 TEM Adapter for FEI
EMS91000-20
TEM Adapter for Zeiss
EMS91000-21
TEM Adapter for Hitachi
Code Title Type Pack Size Availability Price Updated: 16-04-2024
EMS91000-15 Evactron SoftClean system and accessories SoftClean system Each See above Quote only Quote
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EMS91000-18 Evactron SoftClean system and accessories JEOL adapter Each See above Quote only Quote
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EMS91000-19 Evactron SoftClean system and accessories FEI adapter Each See above Quote only Quote
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EMS91000-20 Evactron SoftClean system and accessories Zeiss adapter Each See above Quote only Quote
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EMS91000-21 Evactron SoftClean system and accessories Hitachi adapter Each See above Quote only Quote
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