EMS Q150V Plus automatic coater, 230V

The EMS 150V Plus is optimised for high-vacuum applications, with an ultimate vacuum of 1 x 10-6 mbar. Together with the use of a wide-range Penning/Pirani gauge, this enables the sputtering of oxidising metals with ultra-fine grain sizes, which are suitable for high resolution imaging. The lower background pressure removes oxygen nitrogen and water vapour from the chamber, avoiding chemical reactions during the sputter process, which could otherwise lead to impurities or defects in the coatings. Similarly, lower scattering allows for high purity, amorphous carbon films of high density.The EMS 150V Plus offers all the benefits of the EMS 150T Plus, but with a finer grain size and thinner coating, for ultra-high-resolution applications (above x 200,000 magnification).Applications:Ultra-high-resolution magnification SEMCarbon coating of TEM gridsProtective platinum layers for FIBR&D of corrosio...

The EMS 150V Plus is optimised for high-vacuum applications, with an ultimate vacuum of 1 x 10-6 mbar. Together with the use of a wide-range Penning/Pirani gauge, this enables the sputtering of oxidising metals with ultra-fine grain sizes, which are suitable for high resolution imaging. The lower background pressure removes oxygen nitrogen and water vapour from the chamber, avoiding chemical reactions during the sputter process, which could otherwise lead to impurities or defects in the coatings. Similarly, lower scattering allows for high purity, amorphous carbon films of high density.

The EMS 150V Plus offers all the benefits of the EMS 150T Plus, but with a finer grain size and thinner coating, for ultra-high-resolution applications (above x 200,000 magnification).

Applications:

  • Ultra-high-resolution magnification SEM
  • Carbon coating of TEM grids
  • Protective platinum layers for FIB
  • R&D of corrosion-, friction-, and wear-protective layers
  • Protective layers on medical devices
  • BSE imaging
  • EDX, WDS, EBSD analysis
  • Carbon coating of replicas
  • Nano-technology e.g. Zeolites, polymer nanobrushes

These products are for Research Use Only.

Features:

  • Ultimate vacuum of 1 x 10-6mbar
  • New multi-colour LED visual status indicator
  • 16 Gb of flash memory can store more than 1000 recipes
  • New software sorts recipes per user according to recent use
  • Multiple-user profiles can be set up on one machine
  • New touch and swipe capacitive screen
  • Visual status indicator: A large multi-colour status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance.

The indicator LED shows the following states:

  • Initialisation
  • Process running
  • Idle
  • Coating in progress
  • Process completed
  • Process ended in fault condition

Audio indication also sounds on completion of the process.

Technical Data

Specifications:

Instrument Case 585mm W x 470mm D x 410mm H
Total height with coating head open is 650mm
Weight 33.4kg (Packed 42kg)
Packed dimensions 725mm W x 660mm D x 680mm H
Work Chamber Borosilicate glass 150mm ID x 133mm H
Display 115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), captive touch colour display
User Interface Full graphical interface with touch screen buttons. Includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.
Sputter Target Disc-style 57mm diameter x 0.3mm thick chromium (Cr) target is fitted as standard. V S and V ES versions only
Specimen Stage 50mm diameter rotation stage with rotation speed of 8-20rpm.
Other stages available on request.

Vacuum

Rotary pump 5m3/hr two-stage rotary pump with oil mist filter. Hydraulically-formed bellows stainless-steel backing line.
Turbo pump Internally mounted 70 L/s air-cooled
Vacuum measurement Wide range gauge
Ultimate Vacuum 1 x 10-6mbar
Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas.
Pump Down Time 5 x 10-6mbar in 30 mins
Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas.
Sputter vacuum range Between 5 x 10-3 and 1 x 10-1 mbar for gold targets

Processes

Sputtering Sputter current 0-150 mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without breaking vacuum and with automatically built-in cooling periods)
Evaporation Carbon evaporation using rods/cord. Thermal evaporation of metals from filaments or boats. For cleaning TEM apertures, a standard molybdenum boat (supplied) can be fitted.

150V PLUS product brochure

Updated: 08-02-2025
Code Title Model Pack Size Availability Price Updated: 08-02-2025
EMS5700 EMS Q150V Plus automatic coater, 230V Q150V S Plus Each 0 in stock (?) P.O.R. Quote
EMS5710 EMS Q150V Plus automatic coater, 230V Q150V E Plus Each 0 in stock (?) P.O.R. Quote
EMS5720 EMS Q150V Plus automatic coater, 230V Q150V ES Plus Each 0 in stock (?) P.O.R. Quote