EDX-XEDS TEM X-ray windows

Suspended germanium is a one-of-a-kind calibration standard for x-ray energy dispersive spectroscopy. Because Ge is seldom encountered in TEM columns, the calibration samples offer a material that cannot be confused with instrument components or signal peaks. Peaks from the Ge are missing from the domain in which system peaks generally occur [2-9 keV and 11-20 keV].

The Ge is suspended over two micron holes etched on a 20nm thick silicon nitride grid.

The single 500 x 500µm window can be utilised with high angles of tilt tomography because, at 70° of tilt, the thin and bevelled 100 micron silicon frame allows you to use a 50 x 50µm region within the centre of the window from any rotational position.

Applications

• Detector energy axis and energy resolution calibration
• Detector Window Transmission Evaluation
• Detector solid angle measurements
• Electron optical instrument system peak measurements
• Specimen holder penumbra measurements

Technical Data

Specifications

References

• Zaluzec NJ, DesOrmeaux JP, and Roussie J. A Ge/SiNx Standard for Evaluating the Performance of X-ray Detectors in the SEM, S/TEM and AEM. Microscopy and Microanalysis, 22(S3): 322-323.
• Zaluzec NJ, Wen J, Wang J, and Miller DJ. Quantitative Measurements of the Penumbra of XEDS Systems in an AEM. Microscopy and Microanalysis, 22(S3): 278-279.