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EDX-XEDS TEM X-ray windows
Suspended germanium is a one-of-a-kind calibration standard for x-ray energy dispersive spectroscopy. Because Ge is seldom encountered in TEM columns, the calibration samples offer a material that cannot be confused with instrument components or signal peaks. Peaks from the Ge are missing from the domain in which system peaks generally occur [2-9 keV and 11-20 keV].The Ge is suspended over two micron holes etched on a 20nm thick silicon nitride grid.The single 500 x 500 micron window can be utilised with high angles of tilt tomography because, at 70 degrees of tilt, the thin and bevelled 100 micron silicon frame allows you to use a 50 x 50 micron region within the centre of the window from any rotational position.ApplicationsDetector energy axis and energy resolution calibrationDetector Window Transmission EvaluationDetector solid angle measurementsElectron optical instrument system peak measurementsSpeci...
Suspended germanium is a one-of-a-kind calibration standard for x-ray energy dispersive spectroscopy. Because Ge is seldom encountered in TEM columns, the calibration samples offer a material that cannot be confused with instrument components or signal peaks. Peaks from the Ge are missing from the domain in which system peaks generally occur [2-9 keV and 11-20 keV].
The Ge is suspended over two micron holes etched on a 20nm thick silicon nitride grid.
The single 500 x 500 micron window can be utilised with high angles of tilt tomography because, at 70 degrees of tilt, the thin and bevelled 100 micron silicon frame allows you to use a 50 x 50 micron region within the centre of the window from any rotational position.
Applications
- Detector energy axis and energy resolution calibration
- Detector Window Transmission Evaluation
- Detector solid angle measurements
- Electron optical instrument system peak measurements
- Specimen holder penumbra measurements
Specifications
| 20 nm thick germanium (Ge) coating on microporous 20 nm thick, low-stress silicon nitride (SiN) |
| Two micron pores on 1:1 pitch grid pattern |
| 100 micron thick frame, fits 3mm sample holders |
| (1) 500 x 500 micron window |
Citations
- Zaluzec NJ, DesOrmeaux JP, and Roussie J. A Ge/SiNx Standard for Evaluating the Performance of X-ray Detectors in the SEM, S/TEM and AEM. Microscopy and Microanalysis, 22(S3): 322-323.
- Zaluzec NJ, Wen J, Wang J, and Miller DJ. Quantitative Measurements of the Penumbra of XEDS Systems in an AEM. Microscopy and Microanalysis, 22(S3): 278-279.
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