Ultra-flat silicon wafers
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Ultra-flat silicon wafers

These ultra-flat wafers can be used for substrate studies or as substrate for AFM and SEM samples by cleaving the wafer.Specifications

These ultra-flat wafers can be used for substrate studies or as substrate for AFM and SEM samples by cleaving the wafer.

Specifications

Size: 4" 6" 8"
Material: Silicon Silicon Silicon
Diameter: 100 mm 150 mm 200 mm
Orientation: <100> <100> <100>
Type/Dopant: P/Boron P/Boron P/Boron
Grade: Prime/CZ Virgin Prime/CZ Virgin Prime/CZ Virgin
Growth Method: CZ CZ CZ
Resistivity: 10-20 Ohm-cm 10-20 Ohm-cm 10-20 Ohm-cm
Thickness: 525?m ?20?m 675?m ?20?m 725?m ?20?m
TTV: <4.00?m <4.00?m <4.00?m
SFPD: <2.0?m <2.0?m <2.0?m
Warp: ?30?m ?30?m ?30?m
Bow: ?30?m ?30?m ?30?m
Particles: ?20@?0.3?m ?20@?0.3?m ?20@?0.3?m
Front Surface: Polished Polished Polished
Back Surface: Etched Etched Etched
Flat: 2 per SEMI Standard 1 per SEMI Standard 2 per SEMI Standard
Site Flatness: <2.0?m <2.0?m <2.0?m
Roughness: Typically 2-3? Typically 2-3? Typically 2-3?
Updated: 09-12-2024
Code Title Diameter Pack Size Availability Price Updated: 09-12-2024
EMS71893-01 Ultra-flat silicon wafers 100mm Each 0 in stock (?) $162.00 AUD
EMS71893-02 Ultra-flat silicon wafers 150mm Each 0 in stock (?) $201.00 AUD
EMS71893-03 Ultra-flat silicon wafers 200mm Each 0 in stock (?) $237.00 AUD