- Collections
Ultra-flat silicon wafers
These ultra-flat wafers can be used for substrate studies or as substrate for AFM and SEM samples by cleaving the wafer. mAde from Silicon.Specifications
These ultra-flat wafers can be used for substrate studies or as substrate for AFM and SEM samples by cleaving the wafer. mAde from Silicon.
Specifications
| Diameter: | 100mm | 150mm | 200mm |
| Orientation: | <100> | ||
| Type/Dopant: | P/Boron | ||
| Grade: | Prime/CZ Virgin | ||
| Growth Method: | CZ | ||
| Resistivity: | 10-20 Ohm-cm | ||
| Thickness: | 525µm ±20µm | 675µm ±20µm | 725µm ±20µm |
| TTV: | <4.00µm | <4.00µm | <4.00µm |
| SFPD: | <2.0µm | <2.0µm | <2.0µm |
| Warp: | ≤30µm | ≤30µm | ≤30µm |
| Bow: | ≤30µm | ≤30µm | ≤30µm |
| Particles: | ≤20@≥0.3µm | ≤20@≥0.3µm | ≤20@≥0.3µm |
| Front Surface: | Polished | Polished | Polished |
| Back Surface: | Etched | Etched | Etched |
| Flat: | 2 per SEMI Standard | 1 per SEMI Standard | 2 per SEMI Standard |
| Site Flatness: | <2.0µm | <2.0µm | <2.0µm |
| Roughness: | Typically 2-3Å | Typically 2-3Å | Typically 2-3Å |
Please choose carefully. Returns of this item are subject to approval.
Updated: 27-02-2026
| Code | Diameter | Pack Size | Availability | Price | Updated: 27-02-2026 |
|---|---|---|---|---|---|
| EMS71893-01 | 100mm | Each | No ETA | $190.00 AUD | |
| EMS71893-02 | 150mm | Each | No ETA | $211.00 AUD | |
| EMS71893-03 | 200mm | Each | No ETA | $275.00 AUD |
* Availability Explanation
X weeks – the estimated lead time, based on the average time taken previously to fill orders from this particular supplier. Lead times are from when we receive your order until when we fill your order. For delivery times, please see shipping information below.
In Stock – Plenty of stock on the shelf, ready to ship.
No ETA – our supplier has advised they cannot provide an accurate ETA. Generally there is some issue with supply, and it may be more than 6 months.
