Evactron EP plasma decontaminators + Android

The Evactron EP decontaminators are the latest model in the E-Series cleaning systems ideal for cleaning high vacuum chambers, SEM/FIB and pre-cleaning of samples. They reduce hydrocarbon contamination from high vacuum chambers by breaking down the carbon and turning it into a gas phase that is then removed by the pumping system. With instant ignition from any vacuum level the highest cleaning rates are reached at low pressures. It uses flowing afterglow to remove surface hydrocarbons from vacuum chambers operating with turbo molecular pumps. Three models available compatible with leading SEM/FIB models.Features:High cleaning efficiencySmall footprint/compact plasma radical source (PRS)Operates at TMP and turbomolecular pressures"Pop" ignition (patent pending)Windows and Android GUI softwareDesktop controllerFits chambers and load locksVacuum safety interlockHigh r...

The Evactron EP decontaminators are the latest model in the E-Series cleaning systems ideal for cleaning high vacuum chambers, SEM/FIB and pre-cleaning of samples. They reduce hydrocarbon contamination from high vacuum chambers by breaking down the carbon and turning it into a gas phase that is then removed by the pumping system. With instant ignition from any vacuum level the highest cleaning rates are reached at low pressures. It uses flowing afterglow to remove surface hydrocarbons from vacuum chambers operating with turbo molecular pumps. Three models available compatible with leading SEM/FIB models.

Features:

  • High cleaning efficiency
  • Small footprint/compact plasma radical source (PRS)
  • Operates at TMP and turbomolecular pressures
  • "Pop" ignition (patent pending)
  • Windows and Android GUI software
  • Desktop controller
  • Fits chambers and load locks
  • Vacuum safety interlock
  • High reliability at 20W and 13.56MHz power supply
  • No vacuum gauge needed
  • NW 40 flange standard, CF 2.75 optional
  • Vacuum only operation interlock
  • >100 ?/min cleaning rates
  • Rack mount for system integration
  • Elegant and compact design
  • Windows GUI interface/Android tablet programming compatibility

Specifications:

  • Energy efficient hollow cathode plasma
  • Flow through gas supply
  • Plasma Radical Source (PRS) design maximises delivery of radicals to chamber
  • "Pop" ignition of the plasma works at pressures below 100Pa/750mTorr
  • Low pressure operation 1-3Pa/7.5-22.5mTorr
  • Starts and operates at turbo molecular pump compatible pressures
  • Fixed match provides maximum plasma power transfer
Model Description Includes
EMS91000-11
Evactron EP Plasma Decontaminator + Android For Hitachi 8200 / 4800 Series SEM
Plasma Radical Source, Horizontal Configuration, Windows 7.0 GUI Programming Software, Table Top Controller, Cable Set (3.8m), System user manual
EMS91000-12
Evactron EP Plasma Decontaminator + Android For JEOL TMP Systems
Plasma Radical Source, Horizontal Configuration, 1cc ignition ballast, Windows 7.0 GUI Programming Software, Table Top Controller, Cable Set (3.8m), System user manual
EMS91000-13
Evactron EP Plasma Decontaminator + Android For Zeiss
Vertical Plasma Radical Source, Table Top Controller, Cable Set (3.8m), GUI Programming Software, System user manual

 

Code Title Type Pack Size Availability Price Updated: 13-04-2024
EMS91000-11 Evactron EP plasma decontaminators + Android Hitachi Each See above Quote only Quote
Quote
EMS91000-12 Evactron EP plasma decontaminators + Android JEOL Each See above Quote only Quote
Quote
EMS91000-13 Evactron EP plasma decontaminators + Android Zeiss Each See above Quote only Quote
Quote