Evactron 25 Zephyr plasma decontaminator

The Evactron 25 Zephyr decontaminator is designed for SEM/FIB systems and offers fast and efficient hydrocarbon removal with no damage to samples or sensitive components. It can accommodate SEMs, FIBs, and other vacuum chambers that use turbo molecular pumps. The easy-to-use tabletop model uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber, eliminating contamination. It is designed to clean/de-contaminate in the turbo pressure regime at 1-50mTorr and has no adverse effects on the TMP temperatures. It offers shorter cleaning time (increased production, less downtime) with one-button operation.

Features:

• No stress to the turbo molecular pump
• Safely decontaminates the chamber without damage to sensitive components
• Shorter cleaning time, giving increased production with less system down time
• Cleans the chamber while in "pump down"
• Increased mean free path, yet ion damage-free
• 5-20W RF power
• ≥10x improved cleaning rate
• One button operation
• 1-50mTorr operating pressure

Frequently Asked Questions

Includes:

• Desktop controller
• PRS-V
• Vertical Plasma Radical
• Source with shroud
• Cable set
• SEM/FIB chambers or load locks
• 2 operating regimes - Classic mode (roughing pressures) and T-pump mode (turbomolecular pressures)

Technical Data

QUOTE ON REQUEST