Evactron 25 Zephyr plasma decontaminator

The Evactron 25 Zephyr decontaminator are designed for SEM/FIB systems and offer fast and efficient hydrocarbon removal with no damage to samples or sensitive components. It can accommodate SEMs, FIBs, and other vacuum chambers that use turbo molecular pumps. The easy to use tabletop model uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber eliminating contamination.  It is designed to clean/de-contaminate in the turbo pressure regime at 1-50mTorr and has no adverse effects on the TMP temperatures. It offers shorter cleaning time (increased production, less downtime) with one button operation.

Features:

• No stress to the turbo molecular pump
• Safely de-contaminates the chamber without damage to sensitive components
• Shorter cleaning time, giving increased production with less system down time
• Cleans chamber while in "pump down"
• Increased mean free path, yet ion damage free
• 5-20W RF power
• ?10x improved cleaning rate
• One button operation
• 1-50mTorr operating pressure

Includes:

• Desktop controller
• PRS-V
• Vertical Plasma Radical
• Source with shroud
• Cable set
• SEM/FIB chambers or load locks
• 2 operating regimes
  • Classic mode (roughing pressures)
  • T-pump mode (turbomolecular pressures)