Evactron 25 Zephyr Plasma Decontaminator

The Evactron Zephyr Decontaminator line was created to accommodate SEMs, FIBs, and other vacuum chambers that use turbo molecular pumps. They are designed for SEM/FIB systems and offer fast and efficient hydrocarbon removal with no damage to samples or sensitive components.

They offer users

• Cleaning of SEM/FIB chambers at turbo pressure
• Shorter cleaning time (increased production, less downtime)
• One button operation

Evactron Model 25 Zephyr Plasma Decontaminator

• Desktop controller
• SEM/FIB chambers or load locks
• 2 operating regimes
  • Classic mode (roughing pressures)
  • T-pump mode (turbomolecular pressures)

This easy to use tabletop model easily removes atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers.

The Evactron Model 25 Zephyr Decontaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber eliminating contamination.

This model was created for chambers that use turbo molecular pumps (TMPs). It is designed to clean/de-contaminate in the turbo pressure regime at 1-50 mTorr and has no adverse effects on the TMP temperatures.

Features

• Clean chambers at turbo pump pressures
• 5-20 Watts RF power
• ≥10x improved cleaning rate
• One button operation
• 1-50 mTorr operating pressure

Benefits

• No stress to the turbo molecular pump
• Safely de-contaminates the chamber without damage to sensitive components
• Shorter cleaning time, giving increased production with less system down time
• Cleans chamber while in "pump down"
• Increased mean free path, yet ion damage free