Disc apertures, gold foil (EMS)

Advanced techniques of thin metal film application permits the apertures to retain a clean hole edge during prolonged beam exposure. Ultra-thin, half-micron design discourages contaminant accumulation and stabilises astigmatic conditions to provide longer life. Conventional mechanical cleaning involving costly down-time is no longer necessary. Because the foil is ultra thin, care must be taken when handling the gold foil apertures.Gold foil aperture tolerances vary as follow:Nominal hole size from 1 to 60µm: ±µmNominal hole size 70µm and up: ±0%Size and Applications:2mm dia. x 0.24mm thick: Phillips, Cameca2mm dia. x 0.53mm thick: Cambridge, Siemens, JEOL, Cameca3mm dia. x 0.12mm thick: Zeiss, Nanolab, Novascan3mm dia. x 0.24mm thick: Philips, ARM, AEI, Cambridge

Advanced techniques of thin metal film application permits the apertures to retain a clean hole edge during prolonged beam exposure. Ultra-thin, half-micron design discourages contaminant accumulation and stabilises astigmatic conditions to provide longer life. Conventional mechanical cleaning involving costly down-time is no longer necessary. Because the foil is ultra thin, care must be taken when handling the gold foil apertures.

Gold foil aperture tolerances vary as follow:

• Nominal hole size from 1 to 60µm: ±µm
• Nominal hole size 70µm and up: ±0%

Size and Applications:

• 2mm dia. x 0.24mm thick: Phillips, Cameca
• 2mm dia. x 0.53mm thick: Cambridge, Siemens, JEOL, Cameca
• 3mm dia. x 0.12mm thick: Zeiss, Nanolab, Novascan
• 3mm dia. x 0.24mm thick: Philips, ARM, AEI, Cambridge

Technical Data