Critical dimension magnification standards, X-axis

Economical, yet full-featured calibration over a wide measurement range.Scale range on X-axis, unmounted60nm chrome for larger features and 20nm chrome with 40nm gold for high-resolution features to give increased contrastUnique serial number for each dieManufactured using advanced MEMS technologyTraceable and Certified Options- Traceable CD standards use average data measured for each wafer. Each certified CD standard is individually calibrated against a NIST measured standard.SpecificationsEMS79505-02:Scale Range Features < tr 2.0mm to 1µm2 mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µmDie Size2.5mm x 2.5mmLinesChrome and GoldSilicon Thickness525 ± 20µm2.0mm to 100nm2mm, 1mm, 0.5m, 0.1mm, 50µm, 10µm, 5µm,...

Economical, yet full-featured calibration over a wide measurement range.

  • Scale range on X-axis, unmounted
  • 60nm chrome for larger features and 20nm chrome with 40nm gold for high-resolution features to give increased contrast
  • Unique serial number for each die
  • Manufactured using advanced MEMS technology

Traceable and Certified Options- Traceable CD standards use average data measured for each wafer. Each certified CD standard is individually calibrated against a NIST measured standard.

Specifications

EMS79505-02:

Scale Range Features < tr 2.0mm to 1µm2 mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm

Die Size 2.5mm x 2.5mm
Lines Chrome and Gold
Silicon Thickness 525 ± 20µm
2.0mm to 100nm 2mm, 1mm, 0.5m, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm

EMS79505-03:

Die Size 2.5mm x 2.5mm
Lines Chrome and Gold
Silicon Thickness 525 ± 20µm
Scale Range Features
2.0mm to 1µm 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm

EMS79505-04:

Die Size 2.5mm x 2.5mm
Lines Chrome and Gold
Silicon Thickness 525 ± 20µm
Scale Range Features
2.0mm to 1µm 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm
Code Title Type Pack Size Availability Price Updated: 24-05-2024
EMS79505-02 Critical dimension magnification standards, X-axis 2mm-100nm, certified Each See above Quote only Quote
Quote
EMS79505-03 Critical dimension magnification standards, X-axis 2mm-1um, traceable Each See above Quote only Quote
Quote
EMS79505-04 Critical dimension magnification standards, X-axis 2mm-1um, certified Each See above Quote only Quote
Quote