Critical dimension magnification standards, X-axis
Economical, yet full-featured calibration over a wide measurement range.
- Scale range on X-axis, unmounted
- 60nm chrome for larger features and 20nm chrome with 40nm gold for high-resolution features to give increased contrast
- Unique serial number for each die
- Manufactured using advanced MEMS technology
Traceable and Certified Options- Traceable CD standards use average data measured for each wafer. Each certified CD standard is individually calibrated against a NIST measured standard.
Specifications
EMS79505-02:
Scale Range Features < tr 2.0mm to 1µm2 mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm
Die Size | 2.5mm x 2.5mm |
Lines | Chrome and Gold |
Silicon Thickness | 525 ± 20µm |
2.0mm to 100nm | 2mm, 1mm, 0.5m, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm |
EMS79505-03:
Die Size | 2.5mm x 2.5mm |
Lines | Chrome and Gold |
Silicon Thickness | 525 ± 20µm |
Scale Range Features | |
2.0mm to 1µm | 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm |
EMS79505-04:
Die Size | 2.5mm x 2.5mm |
Lines | Chrome and Gold |
Silicon Thickness | 525 ± 20µm |
Scale Range Features | |
2.0mm to 1µm | 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm |
Code | Title | Type | Pack Size | Availability | Price | Updated: 06-12-2024 |
---|---|---|---|---|---|---|
EMS79505-02 | Critical dimension magnification standards, X-axis | 2mm-100nm, certified | Each | 0 in stock (?) | P.O.R. | Quote |
EMS79505-03 | Critical dimension magnification standards, X-axis | 2mm-1um, traceable | Each | 0 in stock (?) | P.O.R. | Quote |
EMS79505-04 | Critical dimension magnification standards, X-axis | 2mm-1um, certified | Each | 0 in stock (?) | P.O.R. | Quote |
* Ordering Schedule
This item is available for back-order where 0 stock is listed.
We order from this manufacturer weekly, with an estimated lead time of 4 weeks.
This is the estimated lead time, based on the average time taken previously to fill orders from this particular supplier.
Lead times are from when we receive your order until when we fill your order. For delivery times, please see shipping information below.