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EMS annular sputter targets, 87/57mm diameter
EMS precious metal sputtering targets are made from high purity metals, starting 99.99% with most standard disc sizes, for use on most sputtering units from many manufacturers: Quorum Technologies, Emitech, Emscope, Bio-Rad, Polaron, Edwards, Balzers, Plasma Sciences, Technics Hummers, Denton, Cressington, and much more.
Targets come in a standard thickness of 0.1mm (100µm). Other thickness, ranging from 0.05 to 6mm, are available upon request. Targets are available mounted or unmounted, please state the make and the model of the sputtering unit to assist with mounting requirements. Targets in other materials and with diameters from 4mm to 304.8mm are available upon request.
Pricing may fluctuate due to the price of precious metals, contact us for a quote.
Sizes of annular targets (washer type):Â
117mm outside dia. x 89mm inside dia.
87mm outside dia. x 57mm inside dia.
59mm outside dia. x 33mm inside dia.
57mm outside dia. x 40mm inside dia.
| Code | Material | Size | Pack Size | Availability | Price | Updated: 04-06-2026 |
|---|---|---|---|---|---|---|
| EMS91031-AU | Gold | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
| EMS91031-PD | Palladium | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
| EMS91031-PP | Platinum/palladium 80:20 | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
| EMS91031-NI | Nickel | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
| EMS91031-CU | Copper | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
| EMS91031-W | Tungsten | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
| EMS91031-TI | Titanium | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
| EMS91031-CO | Cobalt | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
| EMS91031-AG | Silver | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
| EMS91031-AP | Gold/palladium 60:40 | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
| EMS91031-FE | Iron | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
| EMS91031-IR | Iridium | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
| EMS91031-MO | Molybdenum | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
| EMS91031-PT | Platinum | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
| EMS91031-TA | Tantalum | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
| EMS91031-C | Carbon | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
| EMS91031-CR | Chromium | 87/57mm dia. x 0.1mm | Each | No ETA | P.O.R. | Quote |
* Availability Explanation
X weeks – the estimated lead time, based on the average time taken previously to fill orders from this particular supplier. Lead times are from when we receive your order until when we fill your order. For delivery times, please see shipping information below.
In Stock – Plenty of stock on the shelf, ready to ship.
No ETA – our supplier has advised they cannot provide an accurate ETA. Generally there is some issue with supply, and it may be more than 6 months.
