Calibration standards, 70-1D

This Calibration Reference specimen comes with a non-traceable, manufacturer's certificate. This states the average period, based on batch measurements. The patterned area is easy to find. The three rectangles shown in the sketch are visible in reflected light, with either the unaided eye or an optical microscope. 

In a low magnification SEM image, the contrast is reversed. The central rectangle, which is the grating pattern, is relatively bright.  The grating lines are parallel to the long side of the rectangle, as suggested by the high magnification SEM image. 

For SEM, this specimen works well at a wide range of accelerating voltages (1 kV to 20 kV have been tested) and calibrates images from 25 kX to 1000 kX. 

For AFM, use in contact, intermittent contact (TappingMode™) and other modes with image sizes from 100 to 3000 nm. Available unmounted or mounted on steel disks.

AFM Tapping Mode scan: The ridge height is about 35 nm. This specimen is not recommended as a height reference because the standard AFM probes may not always reach the substrate level between the ridges. Nevertheless, the image contrast is high, even when the probe tip is slightly dull. You can scan in contact mode, which means you can calibrate and measure faster.

Period: 70 nm pitch, one-dimensional array. Accurate to +/- 0.25 nm.  Refer to calibration certificate for actual pitch.

Usability: The calibrated pattern covers a 1.2 x 0.5 mm area. There is sufficient usable area to make thousands of measurements without reusing any areas altered or contaminated by previous scans.

Surface: Silicon Oxide ridges on Silicon, 4 x 3 mm die.  Ridge height (about 35 nm) and width (about 35 nm) are not calibrated.

Normally supplied unmounted. 

SEM High Magnification Image:  Magnification= 200 kX;  Voltage= 5 kV. 

Available in the following ways: unmounted, 15 mm steel disk(for AFM), SEM pin stub, or any other type of SEM stub.  

Store at room temperature