Evactron EP plasma decontaminators + Android

The Evactron EP decontaminators are the latest model in the E-Series cleaning systems ideal for cleaning high vacuum chambers, SEM/FIB and pre-cleaning of samples. They reduce hydrocarbon contamination from high vacuum chambers by breaking down the carbon and turning it into a gas phase that is then removed by the pumping system. With instant ignition from any vacuum level the highest cleaning rates are reached at low pressures. It uses flowing afterglow to remove surface hydrocarbons from vacuum chambers operating with turbo molecular pumps. Three models available compatible with leading SEM/FIB models.

Features:

• High cleaning efficiency
• Small footprint/compact plasma radical source (PRS)
• Operates at TMP and turbomolecular pressures
• "Pop" ignition (patent pending)
• Windows and Android GUI software
• Desktop controller
• Fits chambers and load locks
• Vacuum safety interlock
• High reliability at 20W and 13.56MHz power supply
• No vacuum gauge needed
• NW 40 flange standard, CF 2.75 optional
• Vacuum only operation interlock
• >100 ?/min cleaning rates
• Rack mount for system integration
• Elegant and compact design
• Windows GUI interface/Android tablet programming compatibility

Specifications:

• Energy efficient hollow cathode plasma
• Flow through gas supply
• Plasma Radical Source (PRS) design maximises delivery of radicals to chamber
• "Pop" ignition of the plasma works at pressures below 100Pa/750mTorr
• Low pressure operation 1-3Pa/7.5-22.5mTorr
• Starts and operates at turbo molecular pump compatible pressures
• Fixed match provides maximum plasma power transfer