Evactron CombiClean system and accessories

The Evactron CombiClean System is designed as a complete cleaning arrangement and includes an integrated vacuum chamber for desktop cleaning samples and vacuum parts, as well as an external Plasma Radical Source (PRS) for Evactron in-situ cleaning of E-beam instruments such as SEMs, FIBs, and other analytic instruments, by expelling carbon pollution.

The system monitors activity of either PRS unit, has internal memory, and is intended for routine tasks with minimal operator training. Onboard control allows for changing the cleaning modes between external and internal PRS with simply the flip of a switch. It is perfect with rotary vane pumps without the stress of oil backstreaming. A dry nitrogen cleanse keeps specimens clean after a plasma cleaning, and a storage mode enables you to proceed with dry nitrogen cleansing a sample while the external PRS is in use.

Specifications:  

The system features a microprocessor with embedded software to regulate a leak valve and control the chamber pressure by a MicroPirani gauge. The microprocessor also controls the RF power, has a clock to time the downstream plasma cleaning and nitrogen purging cycles, and records the operational and fault log. Cleaning with the Evactron CombiClean System may be setup from either the front panel or a remote computer.

• VentDetect Technology
• Compatible with rotary vane pumps without the worry of oil backstreaming
• Dry Nitrogen purge feature keeps specimens clean after plasma cleaning
• Storage mode allows continued dry nitrogen purging of samples while external PRS is in use
• System monitors operation of either PRS unit
• Onboard control allows for cleaning modes between internal and external PRS with just the flip of a switch
• Wide Pressure Range

Pump Specifications:  

• A dry scroll pump rated at 6.8m3/h or better.
• A pump rated at 13.5m3/h is preferred.
• You may need to adapt the KF16 flange on the pump valve to a KF25 flange found on many roughing pumps.
• Use a roughing line of 25mm in diameter or larger.

 Technical Data Sheet