SPM calibration specimens, 150-2DUTC

Precision holographic pattern for calibration in horizontal plane of nanometer-scale measurements. Period: 144nm pitch, two-dimensional array. Aluminium bumps (90nm height 75nm width) on Silicon.

Very High Resolution Reference and Traceable Standards for Magnification Calibration of AFM, SEM, Auger, and FIB

General Purpose ? High Precision

A precision, holographic pattern provides accurate calibration in the horizontal plane for very high resolution, nanometer-scale measurements.

Period: 144nm pitch, two-dimensional array. Accurate to ?1nm. Refer to calibration certificate for actual pitch.

Surface: Aluminium bumps on Silicon, 4 x 3mm die. Bump height (about 90nm) and width (about 75nm) are not calibrated.

For SEM, an independent analytical lab has tested this specimen in a FE-SEM (field emission scanning electron microscope). They found that the pattern was very uniform and the specimen was easy to image. No significant charging was observed in the voltage range 1-20kV.

Usability: the calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas altered or contaminated by previous scans.

MODEL 150-2DUTC:

This traceable, Certified Standard is a select grade. Each standard is individually measured in comparison with a similar specimen calibrated at PTB. (PTB, Physikalisch-Technischen Bundesanstald, is the German counterpart of NIST). The uncertainty of single pitch value is typically ?14nm (95% confidence interval). Multi-pitch measurements provide the usual square-root of N improvement in precision.

We recommended Model 150-2D because of its unique characteristics which make it especially easy to use. The specimen is durable and it allows you can scan in contact mode, offering you faster calibration and measurements. This is the only high resolution 2D calibration specimen we have seen that offers the following characteristics:

• 2-dimensional array for simultaneous calibration of X and Y axes.
• Pitch <500 nm.
• Array of pumps mean the image contrast is high even when the probe tip is slightly dull.
• High contrast in contact mode scans.
• The pattern covers the entire die so that you don?t have to hunt for the scan area.

Available in the following ways: unmounted, 15mm steel disk(for AFM), SEM pin stub, or any other type of SEM stub.