Submicron SEM calibration standards

EMS offers a series of calibration standards with one and two dimension calibrated patterns. The standards come in two grid spacings - 300 nanometers and 700 nanometers. These standards are created utilising holographic interference of a particular laser frequency. They are typically accurate to <1% across the entire surface of the standard.

  • White area material: Tungsten
  • Black area material: Tungsten, or other metal.

Materials:
The calibration specimen consists of a silicon chip with a thin (100nm) thick polymer layer containing the pattern and a thin tungsten film over-coating the entire surface. The tungsten film varies from 20nm to 60nm in thickness, depending on the particular model. This structure has been proven under a wide variety of beam conditions,
from 30kV to sub 12kV.

Dimensions:
300nm or 700nm nominal (exact dimension will be provided with sample). Measurements are made from leading edge to leading edge, etc. Width of individual bars and spaces is not calibrated.

Code Title Model Type Pack Size Availability Price Updated: 19-05-2024
EMS80110-31 Submicron SEM calibration standards Model MXS-301CE Submicron, unmounted Each No ETA Quote only Quote
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EMS80110-31M Submicron SEM calibration standards Model MXS-301CE Submicron, mounted Each No ETA Quote only Quote
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EMS80110-31-PIN Submicron SEM calibration standards Model MXS-301CE Pin mounted Each No ETA Quote only Quote
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EMS80110-71 Submicron SEM calibration standards Model MXS-701CE Submicron, unmounted Each No ETA Quote only Quote
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EMS80110-71M Submicron SEM calibration standards Model MXS-701CE Submicron, mounted Each No ETA Quote only Quote
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EMS80110-71-PIN Submicron SEM calibration standards Model MXS-701CE Pin mounted Each No ETA Quote only Quote
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EMS80110-72 Submicron SEM calibration standards Model MXS-702CE Submicron, unmounted Each No ETA Quote only Quote
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EMS80110-72M Submicron SEM calibration standards Model MXS-702CE Submicron, mounted Each No ETA Quote only Quote
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EMS80110-72-PIN Submicron SEM calibration standards Model MXS-702CE Pin mounted Each No ETA Quote only Quote
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EMS80111-31 Submicron SEM calibration standards Model MXS-301BE Submicron, unmounted Each No ETA Quote only Quote
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EMS80111-31M Submicron SEM calibration standards Model MXS-301BE Submicron, mounted Each No ETA Quote only Quote
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EMS80111-31-PIN Submicron SEM calibration standards Model MXS-301BE Pin mounted Each No ETA Quote only Quote
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EMSSS-301 Submicron SEM calibration standards Model MXS-301BE Certified mount Each No ETA Quote only Quote
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EMSSS-SEM Submicron SEM calibration standards SEM Certified mount Each No ETA Quote only Quote
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