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Product Code: EMS5700

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The EMS 150V Plus is optimised for high-vacuum applications, with an ultimate vacuum of 1 x 10-6 mbar. Together with the use of a wide-range Penning/Pirani gauge, this enables the sputtering of oxidising metals with ultra-fine grain sizes, which are suitable for high resolution imaging. The lower background pressure removes oxygen nitrogen and water vapour from the chamber, avoiding chemical reactions during the sputter process, which could otherwise lead to impurities or defects in the coatings. Similarly, lower scattering allows for high purity, amorphous carbon films of high density.

The EMS 150V Plus offers all the benefits of the EMS 150T Plus, but with a finer grain size and thinner coating, for ultra-high-resolution applications (above x 200,000 magnification).

Brochure

Recommended applications for EMS 150V Plus

These products are for Research Use Only.

Key Features

Product Description

The EMS 150V Plus is available in three configurations:

Recommended applications for EMS 150V Plus

These products are for Research Use Only.

Improved interface

Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use.

Intelligent system logic automatically detects which insert is in place and displays the appropriate operating settings and controls for that process.

System prompts user to confirm target material and it then automatically selects appropriate parameters for that material.

Intuitive software allows the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience a number of typical sputtering and carbon coating profiles are already stored but also allows the user to create their own.

Software detects failure to achieve vacuum in a set period of time and shuts down the process in case of vacuum leak, which ensures pump protection from overheating.

Controlled ramped carbon rod evaporation

Careful evaporation allows precise control of carbon thickness (with or without the optional film thickness monitor). The quality of the resulting carbon films is also enhanced by the eradication of "sparking" that is a common feature of less advanced coaters.

For reproducible high-quality carbon films, we would recommend the use of shaped carbon rods. Rods are higher purity, less susceptible to debris and easier to control. Pulsed and ramped carbon rod recipes are supplied as standard.

Cool Magnetron Sputtering

Sputter coating is a technique widely used in various applications. It is possible to create a plasma and sputter metals with high voltage, poor vacuum and no automation. However, this is not suitable for electron microscopy applications because it will heat the sample and can result in damage when the plasma interacts with the sample. The EMS 150V Plus series uses low temperature enhanced-plasma magnetrons optimised for the rotary pump pressures, combined with low current and deposition control, which ensures your sample is protected and uniformly coated.

The EMS 150V S Plus and EMS 150V ES Plus use easy-change, 57 mm diameter, disc-style targets which are designed to sputter oxidising and noble metals. The EMS 150V S Plus and EMS 150V ES Plus are fitted as standard with a chromium (Cr) sputter target. Other targets options include Au, Au/Pd, Pt/Pd, Pd, Pt, Cu, Ir, W, ITO and Al. Others are available on request.

Pulsed cleaning for Aluminium sputtering

Aluminium (Al) rapidly forms an oxide layer which can be difficult to remove, but the EMS 150V ES Plus & EMS 150V S Plus have special recipes for Al that reduce the oxide removal time and prevent excessive pre-sputtering of the target.

Interchangeable plug-in heads

This allows the user to configure the system as a sputter coater, evaporator or glow discharge system – all in one space saving format. A carbon cord evaporation insert is available as an option. Automatic detection of the head type when changed.

Detachable chamber with built-in implosion guard

Removable glass chamber and easily accessible base and top plate allows for an easy cleaning process. Users can rapidly change the chamber, if necessary, to avoid cross contamination of sensitive samples. Tall chamber option is available for carbon evaporation to avoid sample heating, improved uniformity for sputtering and to hold taller samples.

Multiple stage options

The EMS 150V Plus has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage).

Some examples:

Other options are available on request.

Safety

The EMS 150V Plus meets key industry CE standards

Specifications

Instrument Case 585 mm W x 470 mm D x 410 mm H
Total height with coating head open is 650 mm
Weight 33.4 kg (Packed 42 kg)
Packed dimensions 725 mm W x 660 mm D x 680 mm H
Work Chamber Borosilicate glass 150 mm ID x 133 mm H
Display 115.5 mm W x 86.4 mm H (active area), 640 RGB x 480 (display format), captive touch colour display
User Interface Full graphical interface with touch screen buttons. Includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.
Sputter Target Disc-style 57 mm Ø 0.3 mm thick chromium (Cr) target is fitted as standard. V S and V ES versions only
Specimen Stage 50 mm Ø rotation stage with rotation speed of 8-20 rpm.
Other stages available on request.

Vacuum

Rotary pump 5m3/hr two-stage rotary pump with oil mist filter. Hydraulically-formed bellows stainless-steel backing line.
Turbo pump Internally mounted 70 L/s air-cooled
Vacuum measurement Wide range gauge
Ultimate Vacuum 1 x 10-6 mbar
Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas.
Pump Down Time 5 x 10-6 mbar in 30 mins
Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas.
Sputter vacuum range Between 5 x 10-3 and 1 x 10-1 mbar for gold targets

Processes

Sputtering Sputter current 0-150 mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without breaking vacuum and with automatically built-in cooling periods)
Evaporation Carbon evaporation using rods/cord. Thermal evaporation of metals from filaments or boats. For cleaning TEM apertures, a standard molybdenum boat (supplied) can be fitted.

Visual status indicator

A large multi-colour status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance.

The indicator LED shows the following states:

Audio indication also sounds on completion of the process.


The EMS 150V Plus is optimised for high-vacuum applications, with an ultimate vacuum of 1 x 10-6 mbar. Together with the use of a wide-range Penning/Pirani gauge, this enables the sputtering of oxidising metals with ultra-fine grain sizes, which are suitable for high resolution imaging. The lower background pressure removes oxygen nitrogen and water vapour from the chamber, avoiding chemical reactions during the sputter process, which could otherwise lead to impurities or defects in the coatings. Similarly, lower scattering allows for high purity, amorphous carbon films of high density.

The EMS 150V Plus offers all the benefits of the EMS 150T Plus, but with a finer grain size and thinner coating, for ultra-high-resolution applications (above x 200,000 magnification).

Brochure

Recommended applications for EMS 150V Plus

These products are for Research Use Only.

Key Features

Product Description

The EMS 150V Plus is available in three configurations:

Recommended applications for EMS 150V Plus

These products are for Research Use Only.

Improved interface

Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use.

Intelligent system logic automatically detects which insert is in place and displays the appropriate operating settings and controls for that process.

System prompts user to confirm target material and it then automatically selects appropriate parameters for that material.

Intuitive software allows the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience a number of typical sputtering and carbon coating profiles are already stored but also allows the user to create their own.

Software detects failure to achieve vacuum in a set period of time and shuts down the process in case of vacuum leak, which ensures pump protection from overheating.

Controlled ramped carbon rod evaporation

Careful evaporation allows precise control of carbon thickness (with or without the optional film thickness monitor). The quality of the resulting carbon films is also enhanced by the eradication of "sparking" that is a common feature of less advanced coaters.

For reproducible high-quality carbon films, we would recommend the use of shaped carbon rods. Rods are higher purity, less susceptible to debris and easier to control. Pulsed and ramped carbon rod recipes are supplied as standard.

Cool Magnetron Sputtering

Sputter coating is a technique widely used in various applications. It is possible to create a plasma and sputter metals with high voltage, poor vacuum and no automation. However, this is not suitable for electron microscopy applications because it will heat the sample and can result in damage when the plasma interacts with the sample. The EMS 150V Plus series uses low temperature enhanced-plasma magnetrons optimised for the rotary pump pressures, combined with low current and deposition control, which ensures your sample is protected and uniformly coated.

The EMS 150V S Plus and EMS 150V ES Plus use easy-change, 57 mm diameter, disc-style targets which are designed to sputter oxidising and noble metals. The EMS 150V S Plus and EMS 150V ES Plus are fitted as standard with a chromium (Cr) sputter target. Other targets options include Au, Au/Pd, Pt/Pd, Pd, Pt, Cu, Ir, W, ITO and Al. Others are available on request.

Pulsed cleaning for Aluminium sputtering

Aluminium (Al) rapidly forms an oxide layer which can be difficult to remove, but the EMS 150V ES Plus & EMS 150V S Plus have special recipes for Al that reduce the oxide removal time and prevent excessive pre-sputtering of the target.

Interchangeable plug-in heads

This allows the user to configure the system as a sputter coater, evaporator or glow discharge system – all in one space saving format. A carbon cord evaporation insert is available as an option. Automatic detection of the head type when changed.

Detachable chamber with built-in implosion guard

Removable glass chamber and easily accessible base and top plate allows for an easy cleaning process. Users can rapidly change the chamber, if necessary, to avoid cross contamination of sensitive samples. Tall chamber option is available for carbon evaporation to avoid sample heating, improved uniformity for sputtering and to hold taller samples.

Multiple stage options

The EMS 150V Plus has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage).

Some examples:

Other options are available on request.

Safety

The EMS 150V Plus meets key industry CE standards

Specifications

Instrument Case 585 mm W x 470 mm D x 410 mm H
Total height with coating head open is 650 mm
Weight 33.4 kg (Packed 42 kg)
Packed dimensions 725 mm W x 660 mm D x 680 mm H
Work Chamber Borosilicate glass 150 mm ID x 133 mm H
Display 115.5 mm W x 86.4 mm H (active area), 640 RGB x 480 (display format), captive touch colour display
User Interface Full graphical interface with touch screen buttons. Includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.
Sputter Target Disc-style 57 mm Ø 0.3 mm thick chromium (Cr) target is fitted as standard. V S and V ES versions only
Specimen Stage 50 mm Ø rotation stage with rotation speed of 8-20 rpm.
Other stages available on request.

Vacuum

Rotary pump 5m3/hr two-stage rotary pump with oil mist filter. Hydraulically-formed bellows stainless-steel backing line.
Turbo pump Internally mounted 70 L/s air-cooled
Vacuum measurement Wide range gauge
Ultimate Vacuum 1 x 10-6 mbar
Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas.
Pump Down Time 5 x 10-6 mbar in 30 mins
Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas.
Sputter vacuum range Between 5 x 10-3 and 1 x 10-1 mbar for gold targets

Processes

Sputtering Sputter current 0-150 mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without breaking vacuum and with automatically built-in cooling periods)
Evaporation Carbon evaporation using rods/cord. Thermal evaporation of metals from filaments or boats. For cleaning TEM apertures, a standard molybdenum boat (supplied) can be fitted.

Visual status indicator

A large multi-colour status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance.

The indicator LED shows the following states:

Audio indication also sounds on completion of the process.


Shipping

Orders with items in stock are packed within 24 hours. We ship with our best choice of courier, depending on goods ordered and shipping address provided.

Location

Standard delivery

Express delivery

Townsville/Local

Next day

N/A

Queensland

2-3 business days

N/A

NSW

4-10 business days

2-3 business days

SA/Tas/Vic/WA

6-14 business days

2-3 business days

Overseas

N/A

5-14 business days

*Note: Delivery times are as provided by our carriers and are estimates only. Delays may occur during peak periods, and due to factors outside the carriers' control.

Standard shipping is $15 in Australia (free on orders over $200). Add $5 to ship Express (under 2kg only)

Pickup

Order online and collect from our warehouse in Townsville.

Location

Freight Charge

Ready for collection

11 Carlton Street, Kirwan

$0

Once invoice has been emailed
(Less than 1 business day)



Shipping

Orders with items in stock are packed within 24 hours. We ship with our best choice of courier, depending on goods ordered and shipping address provided.

Location

Standard delivery

Express delivery

Townsville/Local

Next day

N/A

Queensland

2-3 business days

N/A

NSW

4-10 business days

2-3 business days

SA/Tas/Vic/WA

6-14 business days

2-3 business days

Overseas

N/A

5-14 business days

*Note: Delivery times are as provided by our carriers and are estimates only. Delays may occur during peak periods, and due to factors outside the carriers' control.

Standard shipping is $15 in Australia (free on orders over $200). Add $5 to ship Express (under 2kg only)

Pickup

Order online and collect from our warehouse in Townsville.

Location

Freight Charge

Ready for collection

11 Carlton Street, Kirwan

$0

Once invoice has been emailed
(Less than 1 business day)



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