{"title":"EQU Etchers","description":"","products":[{"product_id":"reactive-ion-etchers-model-rie-2000","title":"Reactive ion etchers, Model RIE 2000","description":"\u003cp\u003eThe Reactive Ion Etcher (RIE) is a table-top plasma chemistry reactor designed to provide anisotropic etch plasma technology at a moderate cost. This simple-to-operate instrument can perform repeatable plasma chemical reactions with a minimum of automation. All controls are manually entered into and monitored by a touch-screen interfaced control system which is equipped with automatic monitors and interlock controls to protect the equipment and the samples in the reactor. The RIE requires cooling of the stage. A simple water recirculator is typically sufficient for this task. A small water chiller option is also available for this system. Vacuum is supplied by an integrated turbo pump.\u003c\/p\u003e\u003cp\u003eWet etching of samples is not only dangerous, in many cases it causes undercutting due to the isotropy of the etch. The Reactive Ion Etcher (RIE) uses dry etching to create an anisotropic etch - meaning that the etch is uni-directional. For laboratory applications, the typical plasma etcher has a \"barrel\" design, or in other words, a cylindrical or barrel geometry to the reaction chamber. One feature of this design is that any point on the surface to be etched can be approached with equal probability from all directions, leading to an etch that is described as being \"isotropic\". For most if not many applications generally, an isotropic design is probably the design of choice. But in some instances, such as the removal of a passivization layer from an electronic device, isotropic etching always results in undercutting, and when the lines are below a certain point in width, such processing completely undercuts the lines leading to the layers literally falling off. But because for a \"barrel\" design, one can achieve respectable etch rates at relatively low power, the systems can be built and sold at lower prices.\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eApplications:\u003c\/strong\u003e\u003c\/p\u003e\u003cul\u003e\n\u003cli\u003eFinal package removal\u003c\/li\u003e\n\u003cli\u003eGlass passivation layer removal\u003c\/li\u003e\n\u003cli\u003eDeep etching\u003c\/li\u003e\n\u003cli\u003eRemoval of contaminants\u003c\/li\u003e\n\u003c\/ul\u003e\u003cp\u003e\u003cstrong\u003eSystem Includes:\u003c\/strong\u003e\u003c\/p\u003e\u003cul\u003e\n\u003cli\u003eReactive Ion Etcher\u003c\/li\u003e\n\u003cli\u003eQuartz Chamber\u003c\/li\u003e\n\u003cli\u003eVacuum hose\u003c\/li\u003e\n\u003c\/ul\u003e\u003cp\u003eSpecifications:\u003c\/p\u003e\u003ctable style=\"margin-right: calc(7%); width: 93%;\"\u003e\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 32.9%;\"\u003eDesign\u003c\/td\u003e\n\u003ctd style=\"text-align: center; width: 65.8552%;\"\u003eTable top size, LED touch screen for ease of use, \u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 32.9%;\"\u003eDimensions (L x W x H)\u003c\/td\u003e\n\u003ctd style=\"text-align: center; width: 65.8552%;\"\u003e381 x 533 x 356mm\u003cbr\u003e\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eChamber Size\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003e8\" outside diameter x 4in high, 6\" sample stage\u003cbr\u003eShielded Quartz chamber\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePump\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003e70 1\/sec Turbomolecular Pump\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSystem Vent\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003eIndependent interlocked solenoid with connection for dry nitrogen\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 32.9%;\"\u003eGas Delivery\u003c\/td\u003e\n\u003ctd style=\"text-align: center; width: 65.8552%;\"\u003eDual gas input, manual gas and pressure control.\u003cbr\u003eWorks with O2, CF4, Ar and other gasses\u003cbr\u003eComplete with Turbo System and controller\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eGas Control\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003eDual independent needle valves with safety interlocked solenoid\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 32.9%;\"\u003eTimer\u003c\/td\u003e\n\u003ctd style=\"text-align: center; width: 65.8552%;\"\u003eAuto-termination of etch up to 99:99:59\u003cbr\u003eProcess timer for reproducible runs\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 32.9%;\"\u003ePower\u003c\/td\u003e\n\u003ctd style=\"text-align: center; width: 65.8552%;\"\u003eUser variable 0-200W; 13.56 MHz frequency, manual tune; air cooled; solid state design.\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 32.9%;\"\u003eElectrical\u003c\/td\u003e\n\u003ctd style=\"text-align: center; width: 65.8552%;\"\u003e110\/240VAC, 50\/60Hz\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 32.9%;\"\u003e\u003cbr\u003e\u003c\/td\u003e\n\u003ctd style=\"text-align: center; width: 65.8552%;\"\u003e75lb\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e\u003cp\u003eThe system does include a simple water circulator. We would recommend that a small water chiller be used which will provide a reliable flow of cool water.\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eAlso available:\u003c\/strong\u003e\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eEMS55321-2D\u003c\/strong\u003e - Replacement standard die, 3mm\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eEMS55320-05 \u003c\/strong\u003e- UC170 Chiller by Solid State Cooling Systems will give precise temperature control and respond instantly to any load changes holding to ± 0.1°C, even near ambient temperature. It is highly energy efficient, only using power as needed. This unit will fit with ease on your tabletop or inside your equipment, as it is the world's smallest air-cooled recirculating chiller.\u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eUC170 Chiller\u003c\/strong\u003e\u003cstrong\u003e:\u003c\/strong\u003e\u003c\/p\u003e\u003ctable\u003e\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Range\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003e2°C to 45°C (160W \/ 180W models)\u003cbr\u003e10°C to 45°C (170W \/ 190W models)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAmbient Temperature\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003e10°C to 40°C non-condensing\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003e± 0.1°C (even near ambient)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCooling Capacity\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003e160W to 190W @ 20°C (20°C ambient)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eNoise (at 1 meter)\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003e\u0026lt;63dBA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCoolant\/Process Fluid\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003eKoolance (27% propylene glycol\/water mix) or 27-50% ethylene glycol\/water mix\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProcess Fluid Fittings\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003e⅛\" female CPC with shut-off valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePump\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003eMagnetically-coupled gear pump with brushless DC motor\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eTank Volume\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003e75ml with level sensor (optional sealable cap)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWetted Materials\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003eAl and polymers, or Cu and polymers\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSize (L x W x H)\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003e19 x 13 x 18cm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWeight\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003e3.5kg\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower Input\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003eUniversal: 100 - 240VAC, 50\/60Hz, 2.8A max\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower Consumption\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003eLess than 200 Watts\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Voltage\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003e13.5VDC, 15A max (universal input, laptop style power supply included)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCommunications\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003eKeypad or RS232 interface\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAlarms\u003c\/td\u003e\n\u003ctd style=\"text-align: center;\"\u003eTemperature, fluid level, component or system failure (display, RS232 and dry contact)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\u003c\/table\u003e\u003cp\u003e\u003ca href=\"https:\/\/proscitech1-my.sharepoint.com\/:b:\/g\/personal\/ben_proscitech_com\/EQX_TVFlsdZIquRfAwrz6WEBmrBnvFuXuqc31UqGpCGuDQ?e=apzNlT\" rel=\"noopener noreferrer\" style='line-height:1.42;   text-decoration:none;   text-align:center;   white-space:normal;   font-size:calc(var(--typeBaseSize) + 2px);   font-weight:700;   display:inline-block;   padding:var(--btnPadding);   margin:0;   width:auto;   min-width:90px;   vertical-align:middle;   cursor:pointer;   border:1px solid transparent;   -webkit-user-select:none;           user-select:none;   -webkit-appearance:none;   -moz-appearance:none;   border-radius:var(--buttonRadius);   color:{{ settings.color_button_text | default: \"#fff\" }};   color:var(--colorBtnPrimaryText);   background:{{ settings.color_button | default: \"#000\" }};   background:var(--colorBtnPrimary);' target=\"_blank\"\u003eRIE2000 product brochure\u003c\/a\u003e\u003c\/p\u003e","brand":"South Bay Technology","offers":[{"title":"RIE 2000 \/ Each","offer_id":42184399257777,"sku":"EMS55320-02","price":123456.0,"currency_code":"AUD","in_stock":false},{"title":"RIE 2000 with turbo pump \/ Each","offer_id":42184399323313,"sku":"EMS55320-04","price":123456.0,"currency_code":"AUD","in_stock":false},{"title":"UC170 chiller \/ Each","offer_id":42184399356081,"sku":"EMS55320-05","price":123456.0,"currency_code":"AUD","in_stock":false},{"title":"Standard die, 3mm \/ Each","offer_id":42184399388849,"sku":"EMS55321-2D","price":123456.0,"currency_code":"AUD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/2035\/7759\/files\/EMS55320-RIE.png?v=1759296602"}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/2035\/7759\/collections\/download-7_1e6dbe4c-3bf9-4b2d-b1a8-83cee916e2b7.jpg?v=1666844415","url":"https:\/\/ems.proscitech.com.au\/collections\/equ-etchers.oembed","provider":"EMS Australia","version":"1.0","type":"link"}